Inventor
ATWELL ANDREW R
US2 patents
Patents
2 patentsUS7170141B2Jan 30, 2007
Method for monolithically integrating silicon carbide microelectromechanical devices with electronic circuitry
CORNELL RES FOUNDATION INC13 citations80
US7615788B2Nov 10, 2009
Method for monolithically integrating silicon carbide microelectromechanical devices with electronic circuitry
CORNELL RES FOUNDATION INC1 citations48