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Inventor
FUJIMOTO KOTARO
JP
6 patents
⚠️ This page may combine multiple inventors who share the name “FUJIMOTO KOTARO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
2 patents
US4985113A
Jan 15, 1991
Sample treating method and apparatus
HITACHI LTD
55 citations
94
US5320707A
Jun 14, 1994
Dry etching method
HITACHI LTD
27 citations
92
HITACHI HIGH TECH CORP
2 patents
US7662235B2
Feb 16, 2010
Method of cleaning etching apparatus
HITACHI HIGH TECH CORP
9 citations
83
US7186659B2
Mar 6, 2007
Plasma etching method
HITACHI HIGH TECH CORP
5 citations
61
FUJI KAGAKU SHIKOGYO
1 patent
US6391466B1
May 21, 2002
Thermal transfer recording medium
FUJI KAGAKU SHIKOGYO
3 citations
58
YAMADA KENTARO
1 patent
US8506834B2
Aug 13, 2013
Method for dry etching Al2O3 film
YAMADA KENTARO
0 citations
50