Inventor
DAVIS JEFFRY ALAN
US6 patents
Patents
6 patentsUS7371306B2May 13, 2008
Integrated tool with interchangeable wet processing components for processing microfeature workpieces
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US7520286B2Apr 21, 2009
Apparatus and method for cleaning and drying a container for semiconductor workpieces
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US7198694B2Apr 3, 2007
Integrated tool with interchangeable wet processing components for processing microfeature workpieces and automated calibration systems
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US7144813B2Dec 5, 2006
Method and apparatus for thermally processing microelectronic workpieces
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US6866460B2Mar 15, 2005
Apparatus and method for loading of carriers containing semiconductor wafers and other media
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US7541299B2Jun 2, 2009
Method and apparatus for thermally processing microelectronic workpieces
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