Inventor
CHEN SHIH-TSUNG
TW14 patents
⚠️ This page may combine multiple inventors who share the name “CHEN SHIH-TSUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
6 patentsUS12578657B2Mar 17, 2026
Integrated coupon design for surface coating quality
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12020906B2Jun 25, 2024
Grounding cap module and gas injection device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11551911B2Jan 10, 2023
Grounding cap module, gas injection device and etching apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11875973B2Jan 16, 2024
Methods for preparing void-free coatings for plasma treatment components
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations55
US10818479B2Oct 27, 2020
Grounding cap module, gas injection device and etching apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US12400834B2Aug 26, 2025
Cantilever with etch chamber flow design
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations46
SHUTTLE INC
2 patentsCHEN SHIH-TSUNG
2 patentsUS9251581B1Feb 2, 2016
Methods for promoting semiconductor manufacturing yield and classifying defects during fabricating a semiconductor device, and computer readable mediums encoded with a computer program implementing the same
CHEN SHIH-TSUNG14 citations77
US8907656B2Dec 9, 2014
Integrated current sensing apparatus
CHEN SHIH-TSUNG1 citations48