Inventor
YONG HYUNG JUNG
KR2 patents
Patents
2 patentsUS12170233B2Dec 17, 2024
Plasma treatment apparatus, a method of monitoring a process of manufacturing a semiconductor device by using the same, and a method of manufacturing a semiconductor device including the monitoring method
SAMSUNG ELECTRONICS CO LTD0 citations56
US7820994B2Oct 26, 2010
System to test electronic part and method of controlling the same
SAMSUNG ELECTRONICS CO LTD0 citations39