Inventor
WU SUNNY
TW24 patents
⚠️ This page may combine multiple inventors who share the name “WU SUNNY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
8 patentsUS7144297B2Dec 5, 2006
Method and apparatus to enable accurate wafer prediction
TAIWAN SEMICONDUCTOR MFG40 citations92
US8041451B2Oct 18, 2011
Method for bin-based control
TAIWAN SEMICONDUCTOR MFG9 citations82
US7083495B2Aug 1, 2006
Advanced process control approach for Cu interconnect wiring sheet resistance control
TAIWAN SEMICONDUCTOR MFG9 citations74
US9158301B2Oct 13, 2015
Semiconductor processing dispatch control
TAIWAN SEMICONDUCTOR MFG4 citations72
US6843264B2Jan 18, 2005
Multi-phase pressure control valve for process chamber
TAIWAN SEMICONDUCTOR MFG10 citations67
US7851233B2Dec 14, 2010
E-chuck for automated clamped force adjustment and calibration
TAIWAN SEMICONDUCTOR MFG0 citations52
US9141097B2Sep 22, 2015
Adaptive and automatic determination of system parameters
TAIWAN SEMICONDUCTOR MFG1 citations51
US7354623B2Apr 8, 2008
Surface modification of a porous organic material through the use of a supercritical fluid
TAIWAN SEMICONDUCTOR MFG1 citations51
WU SUNNY
4 patentsUS8295965B2Oct 23, 2012
Semiconductor processing dispatch control
WU SUNNY15 citations91
US8205173B2Jun 19, 2012
Physical failure analysis guiding methods
WU SUNNY7 citations79
US8781614B2Jul 15, 2014
Semiconductor processing dispatch control
WU SUNNY2 citations61
US8452439B2May 28, 2013
Device performance parmeter tuning method and system
WU SUNNY4 citations55
TSEN ANDY
2 patentsUS8108060B2Jan 31, 2012
System and method for implementing a wafer acceptance test (“WAT”) advanced process control (“APC”) with novel sampling policy and architecture
TSEN ANDY25 citations90
US8219341B2Jul 10, 2012
System and method for implementing wafer acceptance test (“WAT”) advanced process control (“APC”) with routing model
TSEN ANDY2 citations60