Inventor
STROESSNER ULRICH
DE7 patents
⚠️ This page may combine multiple inventors who share the name “STROESSNER ULRICH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMS GMBH
4 patentsUS7286284B2Oct 23, 2007
Microscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspection
ZEISS CARL SMS GMBH13 citations82
US7535640B2May 19, 2009
Imaging system for emulation of a high aperture scanning system
ZEISS CARL SMS GMBH7 citations71
US7961297B2Jun 14, 2011
Method for determining intensity distribution in the image plane of a projection exposure arrangement
ZEISS CARL SMS GMBH1 citations50
US7626689B2Dec 1, 2009
Method and device for analysing the imaging behavior of an optical imaging element
ZEISS CARL SMS GMBH1 citations49
STROESSNER ULRICH
3 patentsUS8736849B2May 27, 2014
Method and apparatus for measuring structures on photolithography masks
STROESSNER ULRICH5 citations69
US8718354B2May 6, 2014
Method for analyzing masks for photolithography
STROESSNER ULRICH4 citations69
US9116447B2Aug 25, 2015
Microscope for reticle inspection with variable illumination settings
STROESSNER ULRICH0 citations47