Inventor
GEH BERND
US15 patents
⚠️ This page may combine multiple inventors who share the name “GEH BERND”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT AG
5 patentsUS6678240B2Jan 13, 2004
Method for optimizing the image properties of at least two optical elements as well as methods for optimizing the image properties of at least three optical elements
ZEISS CARL SMT AG27 citations90
US7301622B2Nov 27, 2007
Method for optimizing the image properties of at least two optical elements as well as methods for optimizing the image properties of at least three optical elements
ZEISS CARL SMT AG6 citations71
US6934011B2Aug 23, 2005
Method for optimizing the image properties of at least two optical elements as well as methods for optimizing the image properties of at least three optical elements
ZEISS CARL SMT AG11 citations71
US7581305B2Sep 1, 2009
Method of manufacturing an optical component
ZEISS CARL SMT AG2 citations61
US7952685B2May 31, 2011
Illuminator for a lithographic apparatus and method
ZEISS CARL SMT AG0 citations49
GEH BERND
3 patentsZEISS CARL SMT GMBH
3 patentsUS10852643B2Dec 1, 2020
Optical system, and method
ZEISS CARL SMT GMBH3 citations72
US11366382B2Jun 21, 2022
Method and apparatus for performing an aerial image simulation of a photolithographic mask
ZEISS CARL SMT GMBH1 citations58
US9568838B2Feb 14, 2017
Projection objective for microlithography
ZEISS CARL SMT GMBH0 citations51