Inventor
ARMER HELEN R
US16 patents
⚠️ This page may combine multiple inventors who share the name “ARMER HELEN R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
11 patentsUS7018941B2Mar 28, 2006
Post treatment of low k dielectric films
APPLIED MATERIALS INC674 citations98
US7925377B2Apr 12, 2011
Cluster tool architecture for processing a substrate
APPLIED MATERIALS INC45 citations97
US7743728B2Jun 29, 2010
Cluster tool architecture for processing a substrate
APPLIED MATERIALS INC36 citations96
US7694647B2Apr 13, 2010
Cluster tool architecture for processing a substrate
APPLIED MATERIALS INC42 citations96
US6831284B2Dec 14, 2004
Large area source for uniform electron beam generation
APPLIED MATERIALS INC59 citations94
US7819079B2Oct 26, 2010
Cartesian cluster tool configuration for lithography type processes
APPLIED MATERIALS INC26 citations92
US9275334B2Mar 1, 2016
Increasing signal to noise ratio for creation of generalized and robust prediction models
APPLIED MATERIALS INC14 citations84
US8019467B2Sep 13, 2011
Scheduling method for processing equipment
APPLIED MATERIALS INC15 citations82
US7522968B2Apr 21, 2009
Scheduling method for processing equipment
APPLIED MATERIALS INC18 citations82
US7049606B2May 23, 2006
Electron beam treatment apparatus
APPLIED MATERIALS INC3 citations63
US7501354B2Mar 10, 2009
Formation of low K material utilizing process having readily cleaned by-products
APPLIED MATERIALS INC6 citations62
ISHIKAWA TETSUYA
4 patentsUS8550031B2Oct 8, 2013
Cluster tool architecture for processing a substrate
ISHIKAWA TETSUYA13 citations92
US8215262B2Jul 10, 2012
Cluster tool architecture for processing a substrate
ISHIKAWA TETSUYA15 citations92
US8181596B2May 22, 2012
Cluster tool architecture for processing a substrate
ISHIKAWA TETSUYA15 citations92
US8146530B2Apr 3, 2012
Cluster tool architecture for processing a substrate
ISHIKAWA TETSUYA22 citations92