Inventor

CZERNIAK MICHAEL ROGER

GB7 patents

⚠️ This page may combine multiple inventors who share the name “CZERNIAK MICHAEL ROGER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EDWARDS LTD

3 patents

US11839903B2Dec 12, 2023

Vacuum pumping system

EDWARDS LTD0 citations59

US7445023B2Nov 4, 2008

Apparatus for conveying gases to and from a chamber

EDWARDS LTD4 citations58

US10625205B2Apr 21, 2020

Apparatus for evacuating a corrosive effluent gas stream from a processing chamber

EDWARDS LTD0 citations36

SMITH JAMES ROBERT

2 patents

US9081379B2Jul 14, 2015

Evacuation system alerts based on process tool systems bus monitoring

SMITH JAMES ROBERT0 citations46

US8224474B2Jul 17, 2012

Method of controlling operation of a processing system

SMITH JAMES ROBERT0 citations46

CZERNIAK MICHAEL ROGER

1 patent

US9631810B2Apr 25, 2017

Method of treating an exhaust gas stream

CZERNIAK MICHAEL ROGER5 citations63

PHILIPPE LAURENT MARC

1 patent

US8793007B2Jul 29, 2014

Vacuum pumping systems

PHILIPPE LAURENT MARC2 citations51