Inventor

KIYOTA JUNYA

JP5 patents

⚠️ This page may combine multiple inventors who share the name “KIYOTA JUNYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ULVAC INC

2 patents

US7347919B2Mar 25, 2008

Sputter source, sputtering device, and sputtering method

ULVAC INC10 citations77

US11049976B2Jun 29, 2021

Thin-film transistor, oxide semiconductor film, and sputtering target

ULVAC INC0 citations54

AKAMATSU YASUHIKO

2 patents

US8221594B2Jul 17, 2012

Magnetron sputtering apparatus and magnetron sputtering method

AKAMATSU YASUHIKO0 citations41

US8172993B2May 8, 2012

Magnetron sputtering electrode, and sputtering apparatus provided with magnetron sputtering electrode

AKAMATSU YASUHIKO1 citations41

OISHI YUICHI

1 patent

US8460522B2Jun 11, 2013

Method of forming thin film and apparatus for forming thin film

OISHI YUICHI2 citations54