Inventor

KESWANI GAURAV

US15 patents

⚠️ This page may combine multiple inventors who share the name “KESWANI GAURAV”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIKON CORP

8 patents

US8743343B2Jun 3, 2014

Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine

NIKON CORP31 citations92

US7576833B2Aug 18, 2009

Gas curtain type immersion lithography tool using porous material for fluid removal

NIKON CORP21 citations92

US7532309B2May 12, 2009

Immersion lithography system and method having an immersion fluid containment plate for submerging the substrate to be imaged in immersion fluid

NIKON CORP15 citations84

US7929109B2Apr 19, 2011

Apparatus and method for recovering liquid droplets in immersion lithography

NIKON CORP5 citations73

US9176394B2Nov 3, 2015

Immersion lithography apparatus and method having movable liquid diverter between immersion liquid confinement member and substrate

NIKON CORP3 citations62

US7751026B2Jul 6, 2010

Apparatus and method for recovering fluid for immersion lithography

NIKON CORP4 citations62

US9217933B2Dec 22, 2015

Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine

NIKON CORP0 citations51

US11092170B2Aug 17, 2021

Dual valve fluid actuator assembly

NIKON CORP0 citations47

POON ALEX KA TIM

5 patents

US8934080B2Jan 13, 2015

Apparatus and methods for recovering fluid in immersion lithography

POON ALEX KA TIM33 citations93

US8610873B2Dec 17, 2013

Immersion lithography apparatus and method having movable liquid diverter between immersion liquid confinement member and substrate

POON ALEX KA TIM26 citations92

US8289497B2Oct 16, 2012

Apparatus and methods for recovering fluid in immersion lithography

POON ALEX KA TIM35 citations92

US8634055B2Jan 21, 2014

Apparatus and method to control vacuum at porous material using multiple porous materials

POON ALEX KA TIM2 citations62

US8780323B2Jul 15, 2014

Apparatus and method for recovering liquid droplets in immersion lithography

POON ALEX KA TIM0 citations51

POON ALEX

2 patents

US8237911B2Aug 7, 2012

Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine

POON ALEX34 citations90

US8400610B2Mar 19, 2013

Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine

POON ALEX32 citations88