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Inventor
LEE WONHAENG
KR
3 patents
⚠️ This page may combine multiple inventors who share the name “LEE WONHAENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMES CO LTD
2 patents
US9909197B2
Mar 6, 2018
Supporting unit and substrate treating apparatus including the same
SEMES CO LTD
3 citations
65
US9623503B2
Apr 18, 2017
Support unit and substrate treating device including the same
SEMES CO LTD
5 citations
61
LEE WONHAENG
1 patent
US8901459B2
Dec 2, 2014
Substrate supporting units and substrate treating apparatuses including the same
LEE WONHAENG
3 citations
53