P

Inventor

NAKATA TERUO

JP9 patents
⚠️ This page may combine multiple inventors who share the name “NAKATA TERUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NAKATA TERUO

4 patents
US8538573B2Sep 17, 2013

Vacuum processing apparatus and program

NAKATA TERUO6 citations69
US8849446B2Sep 30, 2014

Vacuum processing apparatus and program

NAKATA TERUO1 citations48
US9385016B2Jul 5, 2016

Semiconductor processing system and program

NAKATA TERUO0 citations37
US8812151B2Aug 19, 2014

Vacuum process device and vacuum process method

NAKATA TERUO0 citations36

HITACHI HIGH TECH CORP

2 patents
US8588962B2Nov 19, 2013

Vacuum processing device and method of transporting process subject member

HITACHI HIGH TECH CORP1 citations48
US9507328B2Nov 29, 2016

Processing chamber allocation setting device and processing chamber allocation setting program

HITACHI HIGH TECH CORP0 citations39

HITACHI LTD

1 patent
US11315064B2Apr 26, 2022

Information processing device and production instruction support method

HITACHI LTD0 citations49

TAUCHI SUSUMU

1 patent
US9011065B2Apr 21, 2015

Vacuum processing apparatus and operating method of vacuum processing apparatus

TAUCHI SUSUMU1 citations48

NOGI KEITA

1 patent
US9343340B2May 17, 2016

Vacuum processing apparatus

NOGI KEITA0 citations33