Inventor
YAMAKOSHI Risa
JP7 patents
Patents
7 patentsUS11041240B2Jun 22, 2021
Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium
HITACHI INT ELECTRIC INC2 citations72
US10607833B2Mar 31, 2020
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
HITACHI INT ELECTRIC INC2 citations72
US10513775B2Dec 24, 2019
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
HITACHI INT ELECTRIC INC4 citations72
US10081868B2Sep 25, 2018
Gas supply nozzle, substrate processing apparatus, and non-transitory computer-readable recording medium
HITACHI INT ELECTRIC INC6 citations72
US9905413B2Feb 27, 2018
Method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC1 citations51
US11450524B2Sep 20, 2022
Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium
HITACHI INT ELECTRIC INC0 citations50
US9934960B2Apr 3, 2018
Method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC1 citations50