Inventor

HSU CHE-CHANG

TW20 patents

⚠️ This page may combine multiple inventors who share the name “HSU CHE-CHANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HSU CHE-CHANG

TAIWAN SEMICONDUCTOR MFG CO LTD

Extreme ultraviolet lithography system

Extreme ultraviolet lithography system

Vessel for extreme ultraviolet radiation source

Radiation source apparatus

Apparatus and method for monitoring reflectivity of the collector for extreme ultraviolet radiation source

Extreme ultraviolet lithography system

Semiconductor processing tool and methods of operation

Reticle cleaning device and method of use

EUV vessel perimeter flow auto adjustment

Method of lithography process and transferring a reticle

EUV vessel perimeter flow auto adjustment

Method of lithography process using reticle container with discharging device

Reticle cleaning device and method of use

Reticle with conductive material structure

Apparatus and method for monitoring reflectivity of the collector for extreme ultraviolet radiation source

Method and apparatus for lithography in semiconductor fabrication

Method for discharging static charges on reticle

Photolithography device having illuminator and method for adjusting intensity uniformity

Method and apparatus for lithography in semiconductor fabrication

CLIMAX MACHINE IND CO LTD

Sensing method for a counterfeit bill detector