Inventor
HEUCK FRIEDJOF
DE15 patents
Patents
15 patentsUS11486782B2Nov 1, 2022
Micromechanical device and method for manufacturing a micromechanical device
BOSCH GMBH ROBERT4 citations71
US11060937B2Jul 13, 2021
Micromechanical pressure sensor
BOSCH GMBH ROBERT2 citations69
US9428378B2Aug 30, 2016
Component including two semiconductor elements between which at least two hermetically tightly sealed cavities having different internal pressures are formed and method for manufacturing such a component
BOSCH GMBH ROBERT3 citations68
US12448280B2Oct 21, 2025
Bond structures on MEMS element and ASIC element
BOSCH GMBH ROBERT0 citations60
US9593012B2Mar 14, 2017
Method for producing a micromechanical component, and corresponding micromechanical component
BOSCH GMBH ROBERT0 citations51
US11560302B2Jan 24, 2023
Micromechanical pressure sensor with two cavities and diaphragms and corresponding production method
BOSCH GMBH ROBERT0 citations50
US10753742B2Aug 25, 2020
Micromechanical yaw rate sensor and method for operating same
BOSCH GMBH ROBERT0 citations50
US10753743B2Aug 25, 2020
Micromechanical yaw rate sensor and method for the production thereof
BOSCH GMBH ROBERT0 citations50
US12030773B2Jul 9, 2024
Method for producing a wafer connection
BOSCH GMBH ROBERT0 citations49
US10126224B2Nov 13, 2018
Particle sensor and method for manufacturing a particle sensor
BOSCH GMBH ROBERT1 citations49
US10012828B2Jul 3, 2018
Assembly body for micromirror chips, mirror device and production method for a mirror device
BOSCH GMBH ROBERT0 citations49
US12404170B2Sep 2, 2025
Method for producing a bonding pad for a micromechanical sensor element
BOSCH GMBH ROBERT0 citations44
US12160215B2Dec 3, 2024
Method for manufacturing a piezoelectric resonator
BOSCH GMBH ROBERT0 citations42
US10217926B2Feb 26, 2019
Method for producing a multi-layer electrode system
BOSCH GMBH ROBERT0 citations41
US9233841B2Jan 12, 2016
Production process for a micromechanical component and micromechanical component
BOSCH GMBH ROBERT0 citations41