Inventor
PARK SEUNG
US14 patents
⚠️ This page may combine multiple inventors who share the name “PARK SEUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
11 patentsUS9449845B2Sep 20, 2016
Selective titanium nitride etching
APPLIED MATERIALS INC138 citations99
US9437451B2Sep 6, 2016
Radical-component oxide etch
APPLIED MATERIALS INC134 citations99
US9368364B2Jun 14, 2016
Silicon etch process with tunable selectivity to SiO2 and other materials
APPLIED MATERIALS INC146 citations99
US9355863B2May 31, 2016
Non-local plasma oxide etch
APPLIED MATERIALS INC130 citations99
US9299575B2Mar 29, 2016
Gas-phase tungsten etch
APPLIED MATERIALS INC163 citations99
US9275834B1Mar 1, 2016
Selective titanium nitride etch
APPLIED MATERIALS INC554 citations99
US9111877B2Aug 18, 2015
Non-local plasma oxide etch
APPLIED MATERIALS INC182 citations99
US9023734B2May 5, 2015
Radical-component oxide etch
APPLIED MATERIALS INC182 citations99
US8951429B1Feb 10, 2015
Tungsten oxide processing
APPLIED MATERIALS INC221 citations99
US8921234B2Dec 30, 2014
Selective titanium nitride etching
APPLIED MATERIALS INC187 citations99
US9576788B2Feb 21, 2017
Cleaning high aspect ratio vias
APPLIED MATERIALS INC99 citations98