Inventor
COX HENDRIKUS HERMAN MARIE
NL8 patents
Patents
8 patentsUS6788386B2Sep 7, 2004
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV75 citations95
US10747127B2Aug 18, 2020
Lithographic apparatus
ASML NETHERLANDS BV5 citations68
US11774865B2Oct 3, 2023
Method of controlling a position of a first object relative to a second object, control unit, lithographic apparatus and apparatus
ASML NETHERLANDS BV0 citations58
US10394140B2Aug 27, 2019
Lithographic apparatus
ASML NETHERLANDS BV0 citations50
US10955759B2Mar 23, 2021
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations48
US10114299B2Oct 30, 2018
Lithographic apparatus
ASML NETHERLANDS BV0 citations46
US10962890B2Mar 30, 2021
Positioning device, lithographic apparatus, method for compensating a balance mass torque and device manufacturing method
ASML NETHERLANDS BV0 citations45
US10620552B2Apr 14, 2020
Stage system, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations35