P

Inventor

GOTO HIROHIKO

JP23 patents
⚠️ This page may combine multiple inventors who share the name “GOTO HIROHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KAWASAKI HEAVY IND LTD

14 patents
US10083851B2Sep 25, 2018

Robot with inner and outer belt sections

KAWASAKI HEAVY IND LTD8 citations84
US7043335B2May 9, 2006

Mapping device

KAWASAKI HEAVY IND LTD18 citations84
US7260448B2Aug 21, 2007

Substrate holding device

KAWASAKI HEAVY IND LTD18 citations83
US9929034B2Mar 27, 2018

Substrate transfer device

KAWASAKI HEAVY IND LTD8 citations80
US10395956B2Aug 27, 2019

Substrate transfer apparatus and method of teaching substrate transfer robot

KAWASAKI HEAVY IND LTD5 citations73
US9947566B2Apr 17, 2018

Substrate angle alignment device, substrate angle alignment method, and substrate transfer method

KAWASAKI HEAVY IND LTD2 citations72
US11476138B2Oct 18, 2022

Diagnostic system of substrate transfer hand

KAWASAKI HEAVY IND LTD3 citations71
US10269613B2Apr 23, 2019

Substrate conveying robot and method of operating the same

KAWASAKI HEAVY IND LTD5 citations71
US10403530B2Sep 3, 2019

Substrate conveying robot and substrate processing system

KAWASAKI HEAVY IND LTD1 citations62
US11203121B2Dec 21, 2021

Robot, control device of robot, and method of teaching position of robot

KAWASAKI HEAVY IND LTD1 citations61
US11110599B2Sep 7, 2021

Robot, control device of robot, and method of teaching position of robot

KAWASAKI HEAVY IND LTD1 citations61
US10381257B2Aug 13, 2019

Substrate conveying robot and substrate processing system with pair of blade members arranged in position out of vertical direction

KAWASAKI HEAVY IND LTD1 citations61
US10431482B2Oct 1, 2019

Substrate conveyance robot and substrate detection method

KAWASAKI HEAVY IND LTD0 citations51
US9905446B2Feb 27, 2018

Substrate transferring apparatus

KAWASAKI HEAVY IND LTD0 citations41

AISIN AW CO

5 patents

GOTO HIROHIKO

4 patents