Inventor
HAMA YASUTAKA
JP7 patents
Patents
7 patentsUS11887824B2Jan 30, 2024
Method of cleaning plasma processing apparatus and plasma processing apparatus
TOKYO ELECTRON LTD0 citations59
US10998223B2May 4, 2021
Method for processing target object
TOKYO ELECTRON LTD0 citations59
US11881410B2Jan 23, 2024
Substrate processing apparatus and plasma processing apparatus
TOKYO ELECTRON LTD0 citations53
US11201063B2Dec 14, 2021
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations53
US11705309B2Jul 18, 2023
Substrate processing method
TOKYO ELECTRON LTD0 citations50
US10950458B2Mar 16, 2021
Etching method
TOKYO ELECTRON LTD0 citations48
US10297496B2May 21, 2019
Method for processing target objection
TOKYO ELECTRON LTD0 citations38