Inventor
TAO XIANZHI
US10 patents
⚠️ This page may combine multiple inventors who share the name “TAO XIANZHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
7 patentsUS6479100B2Nov 12, 2002
CVD ruthenium seed for CVD ruthenium deposition
APPLIED MATERIALS INC61 citations94
US6559039B2May 6, 2003
Doped silicon deposition process in resistively heated single wafer chamber
APPLIED MATERIALS INC23 citations90
US6582522B2Jun 24, 2003
Emissivity-change-free pumping plate kit in a single wafer chamber
APPLIED MATERIALS INC37 citations89
US6559074B1May 6, 2003
Method of forming a silicon nitride layer on a substrate
APPLIED MATERIALS INC19 citations83
US7335266B2Feb 26, 2008
Method of forming a controlled and uniform lightly phosphorous doped silicon film
APPLIED MATERIALS INC7 citations72
US6982214B2Jan 3, 2006
Method of forming a controlled and uniform lightly phosphorous doped silicon film
APPLIED MATERIALS INC7 citations72
US12015042B2Jun 18, 2024
Structure and material engineering methods for optoelectronic devices signal to noise ratio enhancement
APPLIED MATERIALS INC0 citations57