Inventor
VAN DIJK LEON PAUL
NL13 patents
Patents
13 patentsUS10474045B2Nov 12, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations71
US11300889B2Apr 12, 2022
Metrology apparatus
ASML NETHERLANDS BV3 citations69
US11294294B2Apr 5, 2022
Alignment mark positioning in a lithographic process
ASML NETHERLANDS BV2 citations66
US11226567B2Jan 18, 2022
Methods and apparatus for use in a device manufacturing method
ASML NETHERLANDS BV2 citations66
US11126093B2Sep 21, 2021
Focus and overlay improvement by modifying a patterning device
ASML NETHERLANDS BV0 citations62
US11320750B2May 3, 2022
Determining an optimal operational parameter setting of a metrology system
ASML NETHERLANDS BV0 citations61
US10788761B2Sep 29, 2020
Determining an optimal operational parameter setting of a metrology system
ASML NETHERLANDS BV1 citations61
US11300888B2Apr 12, 2022
Methods of determining stress in a substrate, control system for controlling a lithographic process, lithographic apparatus and computer program product
ASML NETHERLANDS BV0 citations59
US12189308B2Jan 7, 2025
Method for adjusting a target feature in a model of a patterning process based on local electric fields
ASML NETHERLANDS BV0 citations58
US11619884B2Apr 4, 2023
Method for adjusting a target feature in a model of a patterning process based on local electric fields
ASML NETHERLANDS BV0 citations58
US10545410B2Jan 28, 2020
Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product
ASML NETHERLANDS BV1 citations58
US12254392B2Mar 18, 2025
Apparatus and method for property joint interpolation and prediction
ASML NETHERLANDS BV1 citations57
US11300887B2Apr 12, 2022
Method to change an etch parameter
ASML NETHERLANDS BV0 citations49