Inventor
MOURAILLE ORION JONATHAN PIERRE
NL4 patents
Patents
4 patentsUS11294294B2Apr 5, 2022
Alignment mark positioning in a lithographic process
ASML NETHERLANDS BV2 citations66
US12189308B2Jan 7, 2025
Method for adjusting a target feature in a model of a patterning process based on local electric fields
ASML NETHERLANDS BV0 citations58
US11619884B2Apr 4, 2023
Method for adjusting a target feature in a model of a patterning process based on local electric fields
ASML NETHERLANDS BV0 citations58
US10775705B2Sep 15, 2020
Patterning stack optimization
ASML NETHERLANDS BV0 citations49