Inventor
WANG XIKUN
US51 patents
⚠️ This page may combine multiple inventors who share the name “WANG XIKUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
46 patentsUS9607856B2Mar 28, 2017
Selective titanium nitride removal
APPLIED MATERIALS INC126 citations99
US9520303B2Dec 13, 2016
Aluminum selective etch
APPLIED MATERIALS INC131 citations99
US9478434B2Oct 25, 2016
Chlorine-based hardmask removal
APPLIED MATERIALS INC134 citations99
US9412608B2Aug 9, 2016
Dry-etch for selective tungsten removal
APPLIED MATERIALS INC134 citations99
US9309598B2Apr 12, 2016
Oxide and metal removal
APPLIED MATERIALS INC560 citations99
US9299575B2Mar 29, 2016
Gas-phase tungsten etch
APPLIED MATERIALS INC163 citations99
US9299583B1Mar 29, 2016
Aluminum oxide selective etch
APPLIED MATERIALS INC160 citations99
US9287134B2Mar 15, 2016
Titanium oxide etch
APPLIED MATERIALS INC153 citations99
US9190293B2Nov 17, 2015
Even tungsten etch for high aspect ratio trenches
APPLIED MATERIALS INC251 citations99
US9040422B2May 26, 2015
Selective titanium nitride removal
APPLIED MATERIALS INC194 citations99
US8980763B2Mar 17, 2015
Dry-etch for selective tungsten removal
APPLIED MATERIALS INC206 citations99
US8951429B1Feb 10, 2015
Tungsten oxide processing
APPLIED MATERIALS INC221 citations99
US6527968B1Mar 4, 2003
Two-stage self-cleaning silicon etch process
APPLIED MATERIALS INC268 citations99
US10049891B1Aug 14, 2018
Selective in situ cobalt residue removal
APPLIED MATERIALS INC101 citations98
US9947549B1Apr 17, 2018
Cobalt-containing material removal
APPLIED MATERIALS INC103 citations98
US9711366B2Jul 18, 2017
Selective etch for metal-containing materials
APPLIED MATERIALS INC115 citations98
US9472417B2Oct 18, 2016
Plasma-free metal etch
APPLIED MATERIALS INC138 citations98
US9449846B2Sep 20, 2016
Vertical gate separation
APPLIED MATERIALS INC133 citations98
US9355862B2May 31, 2016
Fluorine-based hardmask removal
APPLIED MATERIALS INC147 citations98
US9355856B2May 31, 2016
V trench dry etch
APPLIED MATERIALS INC146 citations98
US9299582B2Mar 29, 2016
Selective etch for metal-containing materials
APPLIED MATERIALS INC154 citations98
US6699399B1Mar 2, 2004
Self-cleaning etch process
APPLIED MATERIALS INC500 citations98
US6136211AOct 24, 2000
Self-cleaning etch process
APPLIED MATERIALS INC160 citations98
US9373522B1Jun 21, 2016
Titanium nitride removal
APPLIED MATERIALS INC140 citations97
US9659791B2May 23, 2017
Metal removal with reduced surface roughness
APPLIED MATERIALS INC101 citations96
US10465294B2Nov 5, 2019
Oxide and metal removal
APPLIED MATERIALS INC25 citations94
US9553102B2Jan 24, 2017
Tungsten separation
APPLIED MATERIALS INC46 citations94
US8016948B2Sep 13, 2011
Method of removing contaminants from a coating surface comprising an oxide or fluoride of a group IIIB metal
APPLIED MATERIALS INC14 citations84
US6649532B1Nov 18, 2003
Methods for etching an organic anti-reflective coating
APPLIED MATERIALS INC16 citations84
US7368394B2May 6, 2008
Etch methods to form anisotropic features for high aspect ratio applications
APPLIED MATERIALS INC11 citations82
US7846264B2Dec 7, 2010
Cleaning method used in removing contaminants from a solid yttrium oxide-containing substrate
APPLIED MATERIALS INC7 citations74
US10256112B1Apr 9, 2019
Selective tungsten removal
APPLIED MATERIALS INC4 citations73
US10163696B2Dec 25, 2018
Selective cobalt removal for bottom up gapfill
APPLIED MATERIALS INC2 citations73
US9896770B2Feb 20, 2018
Methods of etching films with reduced surface roughness
APPLIED MATERIALS INC2 citations73
US9540736B2Jan 10, 2017
Methods of etching films with reduced surface roughness
APPLIED MATERIALS INC2 citations73
US10727080B2Jul 28, 2020
Tantalum-containing material removal
APPLIED MATERIALS INC4 citations71
US11488812B2Nov 1, 2022
Method and apparatus for reducing particle defects in plasma etch chambers
APPLIED MATERIALS INC1 citations62
US11462411B2Oct 4, 2022
Gate contact over active regions
APPLIED MATERIALS INC0 citations62
US11062887B2Jul 13, 2021
High temperature RF heater pedestals
APPLIED MATERIALS INC1 citations62
US11024537B2Jun 1, 2021
Methods and apparatus for hybrid feature metallization
APPLIED MATERIALS INC0 citations62
US11004687B2May 11, 2021
Gate contact over active processes
APPLIED MATERIALS INC1 citations62
US7780862B2Aug 24, 2010
Device and method for etching flash memory gate stacks comprising high-k dielectric
APPLIED MATERIALS INC2 citations62
US7964512B2Jun 21, 2011
Method for etching high dielectric constant materials
APPLIED MATERIALS INC3 citations58
US10770346B2Sep 8, 2020
Selective cobalt removal for bottom up gapfill
APPLIED MATERIALS INC0 citations52
US10233547B2Mar 19, 2019
Methods of etching films with reduced surface roughness
APPLIED MATERIALS INC0 citations52
US10950500B2Mar 16, 2021
Methods and apparatus for filling a feature disposed in a substrate
APPLIED MATERIALS INC0 citations51
(unassigned)
1 patentAPPLEID MATERIALS INC
1 patentWANG XIKUN
1 patentMICROMATERIALS LLC
1 patentShowing the top 50 of 51 patents by PatentIndex Score.