Inventor

RUFFELL SIMON

US29 patents

⚠️ This page may combine multiple inventors who share the name “RUFFELL SIMON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

RUFFELL SIMON

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

Techniques to engineer nanoscale patterned features using ions

Techniques to engineer nanoscale patterned features using ions

Techniques to engineer nanoscale patterned features using ions

FinFET spacer etch with no fin recess and no gate-spacer pull-down

Techniques for manipulating patterned features using ions

Techniques to engineer nanoscale patterned features using ions

Techniques for processing substrates using directional reactive ion etching

Techniques for manipulating patterned features using ions

Three dimensional structure fabrication control using novel processing system

Techniques for processing substrates using directional reactive ion etching

Techniques and apparatus for elongation patterning using angled ion beams

Method for selectively depositing a layer on a three dimensional structure

Techniques for forming patterned features using directional ions

Non-uniform gate oxide thickness for DRAM device

High efficiency apparatus and method for depositing a layer on a three dimensional structure

FinFet spacer etch with no fin recess and no gate-spacer pull-down

Method for selectively depositing a layer on a three dimensional structure

Filling a cavity in a substrate using sputtering and deposition

Apparatus and method for carbon film deposition profile control

APPLIED MATERIALS INC

Techniques and apparatus for unidirectional hole elongation using angled ion beams

Multi-zone platen temperature control

Temperature controlled/electrically biased wafer surround

Substrate halo arrangement for improved process uniformity

In-situ beam profile metrology

VARIAN SEMICONDUCTOR EQUIPMENT

Method of implanting high aspect ratio features

Techniques for forming angled structures for reduced defects in heteroepitaxy of semiconductor films

Magnetic memory and method of fabrication

Magnetic memory and method of fabrication

EVANS MORGAN D

Compound semiconductor growth using ion implantation