Inventor

OMSTEAD THOMAS R

US31 patents

⚠️ This page may combine multiple inventors who share the name “OMSTEAD THOMAS R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

OMSTEAD THOMAS R

CVC PRODUCTS INC

Apparatus for supporting a substrate in a reaction chamber

Method of chemical-vapor deposition of a material

Method and system for dispensing process gas for fabricating a device on a substrate

Microelectronic interconnect material with adhesion promotion layer and fabrication method

Temperature controlled chuck for vacuum processing

Microelectronic interconnect material with adhesion promotion layer and fabrication method

Microelectronic interconnect material with adhesion promotion layer and fabrication method

Apparatus for dispensing gas for fabricating substrates

Method for fabricating a device on a substrate

System for fabricating a device on a substrate with a process gas

Method for forming a copper film on a substrate

Method of regulating substrate temperature in a low pressure environment

High magnetic flux permanent magnet array apparatus and method for high productivity physical vapor deposition

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

Method for selectively depositing a layer on a three dimensional structure

Method and apparatus for depositing a monolayer on a three dimensional structure

High efficiency apparatus and method for depositing a layer on a three dimensional structure

Method for selectively depositing a layer on a three dimensional structure

Techniques and apparatus for anisotropic metal etching

MICRON TECHNOLOGY INC

Methods of forming silicon-containing dielectric materials and semiconductor device structures

Semiconductor device structures including silicon-containing dielectric materials

Semiconductor device structures including silicon-containing dielectric materials

Methods of forming silicon-containing dielectric materials and methods of forming a semiconductor device comprising nitrogen radicals and oxygen-containing, silicon-containing, or carbon-containing precursors

NOVELLUS SYSTEMS INC

Method for obtaining adhesion for device manufacture

Atomic layer deposition systems and methods

CVC INC

Physical vapor deposition system having reduced thickness backing plate

High magnetic flux cathode apparatus and method for high productivity physical-vapor deposition

VEECO INSTR INC

Atomic layer deposition for fabricating thin films

ALINA DESIGNS INC

Footwear containing improved audio/visual displays

GU TAO

Low platinum fuel cells, catalysts, and method for preparing the same

SANDIA CORP

Method for deposition of a conductor in integrated circuits

VARIAN SEMICONDUCTOR EQUIPMENT

Techniques and apparatus for anisotropic metal etching