P

Inventor

NENYEI ZSOLT

DE14 patents
⚠️ This page may combine multiple inventors who share the name “NENYEI ZSOLT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MATTSON TECH INC

3 patents
US7977258B2Jul 12, 2011

Method and system for thermally processing a plurality of wafer-shaped objects

MATTSON TECH INC11 citations80
US7704898B2Apr 27, 2010

Method for the thermal treatment of disk-shaped substrates

MATTSON TECH INC15 citations79
US7101812B2Sep 5, 2006

Method of forming and/or modifying a dielectric film on a semiconductor surface

MATTSON TECH INC10 citations68

STEAG AST

1 patent
US5872889AFeb 16, 1999

Apparatus and method for rapid thermal processing

STEAG AST54 citations94

(unassigned)

1 patent
US5861609AJan 19, 1999

Method and apparatus for rapid thermal processing

118 citations94

AST ELEKRONIK GMBH

1 patent
US5628564AMay 13, 1997

Method and apparatus for wavevector selective pyrometry in rapid thermal processing systems

AST ELEKRONIK GMBH98 citations94

STEAG AST GMBH

1 patent
US5841110ANov 24, 1998

Method and apparatus for improved temperature control in rapid thermal processing (RTP) systems

STEAG AST GMBH84 citations93

AST ELEKTRONIK GMBH

1 patent
US5359693AOct 25, 1994

Method and apparatus for a rapid thermal processing of delicate components

AST ELEKTRONIK GMBH61 citations92

AST ELECTRONIK

1 patent
US5837555ANov 17, 1998

Apparatus and method for rapid thermal processing

AST ELECTRONIK51 citations91

AST ELEKRONIK

1 patent
US5580830ADec 3, 1996

Modified reaction chamber and improved gas flushing method in rapid thermal processing apparatus

AST ELEKRONIK24 citations87

STEAG RTP SYSTEMS

1 patent
US6100149AAug 8, 2000

Method for rapid thermal processing (RTP) of silicon substrates

STEAG RTP SYSTEMS17 citations82

PEUSE BRUCE W

1 patent
US8236706B2Aug 7, 2012

Method and apparatus for growing thin oxide films on silicon while minimizing impact on existing structures

PEUSE BRUCE W14 citations78

STEAG RTP SYSTEMS GMBH

1 patent
US6830631B2Dec 14, 2004

Method for the removing of adsorbed molecules from a chamber

STEAG RTP SYSTEMS GMBH8 citations71

NENYEI ZSOLT

1 patent
US8575521B2Nov 5, 2013

Monitoring witness structures for temperature control in RTP systems

NENYEI ZSOLT1 citations45