Inventor

KNARR THOMAS

DE5 patents

⚠️ This page may combine multiple inventors who share the name “KNARR THOMAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

(unassigned)

1 patent

US5861609AJan 19, 1999

Method and apparatus for rapid thermal processing

118 citations94

STEAG AST GMBH

1 patent

US5841110ANov 24, 1998

Method and apparatus for improved temperature control in rapid thermal processing (RTP) systems

STEAG AST GMBH84 citations93

AST ELEKTRONIK GMBH

1 patent

US5359693AOct 25, 1994

Method and apparatus for a rapid thermal processing of delicate components

AST ELEKTRONIK GMBH61 citations92

STEAG AST

1 patent

US6369363B2Apr 9, 2002

Method of measuring electromagnetic radiation

STEAG AST30 citations90

STEAG AST ELEKTRONIK GMBH

1 patent

US6191392B1Feb 20, 2001

Method of measuring electromagnetic radiation

STEAG AST ELEKTRONIK GMBH35 citations88