Inventor
KADKHODAYAN BABAK
US14 patents
⚠️ This page may combine multiple inventors who share the name “KADKHODAYAN BABAK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
6 patentsUS6242360B1Jun 5, 2001
Plasma processing system apparatus, and method for delivering RF power to a plasma processing
LAM RES CORP107 citations98
US7169231B2Jan 30, 2007
Gas distribution system with tuning gas
LAM RES CORP47 citations95
US6974523B2Dec 13, 2005
Hollow anode plasma reactor and method
LAM RES CORP59 citations95
US7371332B2May 13, 2008
Uniform etch system
LAM RES CORP29 citations92
US8911589B2Dec 16, 2014
Edge ring assembly with dielectric spacer ring
LAM RES CORP4 citations72
US6132513AOct 17, 2000
Process chemistry resistant manometer
LAM RES CORP8 citations69
KADKHODAYAN BABAK
4 patentsUS8402918B2Mar 26, 2013
Showerhead electrode with centering feature
KADKHODAYAN BABAK435 citations98
US8206506B2Jun 26, 2012
Showerhead electrode
KADKHODAYAN BABAK434 citations98
US8161906B2Apr 24, 2012
Clamped showerhead electrode assembly
KADKHODAYAN BABAK49 citations97
US8313805B2Nov 20, 2012
Clamped showerhead electrode assembly
KADKHODAYAN BABAK16 citations83