Inventor

YUI YOSHIKIYO

JP22 patents

⚠️ This page may combine multiple inventors who share the name “YUI YOSHIKIYO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

YUI YOSHIKIYO

CANON KK

Correcting method for correcting exposure data used for a charged particle beam exposure system

Electron gun and electron beam drawing apparatus using the same

Charged-particle beam exposure apparatus, exposure system, control method therefor, and device manufacturing method

Control system for a charged particle exposure apparatus

Pattern transfer method and apparatus, and device manufacturing method

Exposure control system

Exposure control method and apparatus compensating for detection of offset from a measured value

Charged-particle beam exposure apparatus, charged-particle beam exposure method, control data determination method, and device manufacturing method using this method

Charged-particle beam exposure apparatus and device manufacturing method using the same

Mask pattern transfer method, mask pattern transfer apparatus using the method, and device manufacturing method

Transfer apparatus and transfer method

Exposure method and device manufacturing method using this exposure method

Method and apparatus for automatic focusing

Charged particle beam drawing apparatus and method of manufacturing article

Charged particle optical system, drawing apparatus, and method of manufacturing article

Exposure apparatus

ADVANTEST CORP

Multi-electron beam exposure method and apparatus

Multi-electron beam exposure method and apparatus

HITACHI HIGH TECH CORP

Charged particle beam drawing apparatus

Electron beam source and electron beam exposure apparatus employing the electron beam source

HITACHI LTD

Electron beam exposure method, electron beam exposure apparatus and device manufacturing method using the same

LUXONUS INC

Acoustic-wave measuring device, matching-material bag, matching gel, separation film, and acoustic-wave measurement method