Inventor
OKUYAMA MASANORI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “OKUYAMA MASANORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD
8 patentsUS6113733ASep 5, 2000
Apparatus and method for optical evaluation, apparatus and method for manufacturing semiconductor device, method of controlling apparatus for manufacturing semiconductor device, and semiconductor device
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD76 citations96
US6635495B2Oct 21, 2003
Infrared detecting element, infrared two-dimensional image sensor, and method of manufacturing the same
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD16 citations91
US6849470B1Feb 1, 2005
Apparatus and method for optical evaluation, apparatus and method for manufacturing semiconductor device, method of controlling apparatus for manufacturing semiconductor device, and semiconductor device
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD16 citations84
US6727108B2Apr 27, 2004
Apparatus and method for optical evaluation, apparatus and method for manufacturing semiconductor device, method of controlling apparatus for manufacturing semiconductor device, and semiconductor device
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD15 citations84
US6262418B1Jul 17, 2001
Thermal type infrared sensing device, fabrication method for thermal type infrared sensing device, and infrared imaging system and infrared imaging apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD9 citations72
US6580091B1Jun 17, 2003
Apparatus and method for optical evaluation, apparatus and method for manufacturing semiconductor device, method of controlling apparatus for manufacturing semiconductor device, and semiconductor device
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD4 citations62
US6674081B2Jan 6, 2004
Infrared detecting element, infrared two-dimensional image sensor, and method of manufacturing the same
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD5 citations61
US6576566B2Jun 10, 2003
Apparatus and method for forming thin film at low temperature and high deposition rate
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD4 citations61
SEIKO EPSON CORP
3 patentsUS6419849B1Jul 16, 2002
Method for manufacturing piezoelectric material
SEIKO EPSON CORP37 citations92
US6402304B1Jun 11, 2002
Piezoelectric actuator, ink jet printing head, printer, method for manufacturing piezoelectric actuator, and method for manufacturing ink jet printing head
SEIKO EPSON CORP27 citations90
US6803702B2Oct 12, 2004
Piezoelectric element and method of manufacturing same
SEIKO EPSON CORP2 citations63