Inventor
SMIGEL MICHAEL
US3 patents
Patents
3 patentsUS6752442B2Jun 22, 2004
Workpiece handling end-effector and a method for processing workpieces using a workpiece handling end-effector
SPEEDFAM IPEC CORP26 citations88
US6567725B1May 20, 2003
Method and apparatus for teaching robot station location
SPEEDFAM IPEC CORP11 citations65
US6979034B2Dec 27, 2005
Workpiece handling end-effector and a method for processing workpieces using a workpiece handling end-effector
SPEEDFAM IPEC CORP2 citations58