Inventor
OGLIARI VINCENZO
IT9 patents
Patents
9 patentsUS6648974B1Nov 18, 2003
Device and method for handling substrates by means of a self-leveling vacuum system in epitaxial induction
LPE SPA555 citations96
US7314526B1Jan 1, 2008
Reaction chamber for an epitaxial reactor
LPE SPA32 citations87
US11377754B2Jul 5, 2022
Epitaxial deposition reactor with reflector external to the reaction chamber and cooling method of a susceptor and substrates
LPE SPA2 citations70
US10211085B2Feb 19, 2019
Tool for manipulating substrates, manipulation method and epitaxial reactor
LPE SPA2 citations70
US11834753B2Dec 5, 2023
Reactor for epitaxial deposition with a heating inductor with movable turns
LPE SPA0 citations59
US6991420B2Jan 31, 2006
Tool for handling wafers and epitaxial growth station
LPE SPA0 citations39
US10815585B2Oct 27, 2020
Susceptor with substrate clamped by underpressure, and reactor for epitaxial deposition
LPE SPA0 citations38
US10697087B2Jun 30, 2020
Susceptor with supporting element
LPE SPA0 citations32
US10392723B2Aug 27, 2019
Reaction chamber for epitaxial growth with a loading/unloading device and reactor
LPE SPA0 citations32