Inventor
FARRELL COLIN T
US4 patents
Patents
4 patentsUS6738511B1May 18, 2004
Reduced noise sensitivity method and apparatus for converting an interferogram phase map to a surface profile map
VEECO INSTR INC28 citations84
US6459489B1Oct 1, 2002
Alignment of magnetic heads for automatic identification of regions of interest for interferometric measurement
VEECO INSTR INC10 citations70
US6847460B2Jan 25, 2005
Alignment and correction template for optical profilometric measurement
VEECO INSTR INC8 citations65
US7016050B2Mar 21, 2006
Microscope with fixed-element autocollimator for tilt adjustment
VEECO INSTR INC2 citations58