Inventor
YAHAGI MITSUTOSHI
JP22 patents
Patents
22 patentsUSD717736SNov 18, 2014
Electrical contact for use in a plating apparatus
EBARA CORP12 citations91
USD706224SJun 3, 2014
Electrical contact for use in a plating apparatus
EBARA CORP18 citations91
USD758973SJun 14, 2016
Electrical contact for use in a plating apparatus
EBARA CORP9 citations84
USD742329SNov 3, 2015
Electrical contact for use in a plating apparatus
EBARA CORP7 citations84
USD725600SMar 31, 2015
Electrical contact for use in a plating apparatus
EBARA CORP10 citations84
USD705280SMay 20, 2014
Sealing ring
EBARA CORP8 citations84
USD556692SDec 4, 2007
Electrical contact for use in a plating apparatus
EBARA CORP15 citations84
USD555595SNov 20, 2007
Electrical contact for use in a plating apparatus
EBARA CORP11 citations84
USD719101SDec 9, 2014
Electrical contact for use in a plating apparatus
EBARA CORP10 citations82
US10830834B2Nov 10, 2020
Current measuring module using inspection substrate and inspection substrate
EBARA CORP2 citations72
US11833551B2Dec 5, 2023
Pre-wet module, deaerated liquid circulation system, and pre-wet method
EBARA CORP2 citations68
US10513795B2Dec 24, 2019
Plating apparatus, plating method, and substrate holder
EBARA CORP1 citations61
US10316426B2Jun 11, 2019
Plating apparatus, plating method, and substrate holder
EBARA CORP1 citations61
US10316425B2Jun 11, 2019
Substrate holder, plating apparatus, and plating method
EBARA CORP1 citations61
US10982347B2Apr 20, 2021
Leak checking method, leak checking apparatus, electroplating method, and electroplating apparatus
EBARA CORP0 citations60
US12076760B2Sep 3, 2024
Pre-wet module, deaerated liquid circulation system, and pre-wet method
EBARA CORP0 citations58
US10458036B2Oct 29, 2019
Leak checking method, leak checking apparatus, electroplating method, and electroplating apparatus
EBARA CORP0 citations49
US9708724B2Jul 18, 2017
Anode unit and plating apparatus having such anode unit
EBARA CORP1 citations49
US7897024B2Mar 1, 2011
Conducting belt for use with anode holder and anode holder
EBARA CORP1 citations48
US10106906B2Oct 23, 2018
Plating apparatus
EBARA CORP0 citations41
US10214830B2Feb 26, 2019
Substrate holder and plating apparatus
EBARA CORP0 citations40
US10240247B2Mar 26, 2019
Anode holder and plating apparatus
EBARA CORP0 citations39