Inventor
MIKAMI TORU
JP10 patents
⚠️ This page may combine multiple inventors who share the name “MIKAMI TORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
8 patentsUS7348192B2Mar 25, 2008
Method for monitoring film thickness, a system for monitoring film thickness, a method for manufacturing a semiconductor device, and a program product for controlling film thickness monitoring system
TOSHIBA KK46 citations94
US7573582B2Aug 11, 2009
Method for monitoring film thickness, a system for monitoring film thickness, a method for manufacturing a semiconductor device, and a program product for controlling film thickness monitoring system
TOSHIBA KK9 citations82
US6825938B2Nov 30, 2004
Film thickness measuring method and step measuring method
TOSHIBA KK14 citations82
US7483155B2Jan 27, 2009
Structure inspection method, pattern formation method, process condition determination method and resist pattern evaluation apparatus
TOSHIBA KK6 citations73
US6563594B2May 13, 2003
Mark position detecting system and method for detecting mark position
TOSHIBA KK7 citations71
US7903264B2Mar 8, 2011
Structure inspection method, pattern formation method, process condition determination method and resist pattern evaluation apparatus
TOSHIBA KK0 citations52
US7289232B2Oct 30, 2007
Dimension measurement method, method of manufacturing semiconductor device, dimension measurement apparatus and measurement mark
TOSHIBA KK0 citations40
US9612108B2Apr 4, 2017
Measurement apparatus and measurement method
TOSHIBA KK0 citations39