Inventor
YOSHIDA KAZUTO
JP8 patents
⚠️ This page may combine multiple inventors who share the name “YOSHIDA KAZUTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI HEAVY IND LTD
4 patentsUS7806078B2Oct 5, 2010
Plasma treatment apparatus
MITSUBISHI HEAVY IND LTD468 citations96
US7283346B2Oct 16, 2007
Electrostatic chuck and its manufacturing method
MITSUBISHI HEAVY IND LTD4 citations62
US9011634B2Apr 21, 2015
Plasma processing apparatus and plasma processing method
MITSUBISHI HEAVY IND LTD2 citations61
US7520246B2Apr 21, 2009
Power supply antenna and power supply method
MITSUBISHI HEAVY IND LTD2 citations61