Inventor
OTANI SEIJI
JP11 patents
⚠️ This page may combine multiple inventors who share the name “OTANI SEIJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
5 patentsUS7369223B2May 6, 2008
Method of apparatus for detecting particles on a specimen
HITACHI HIGH TECH CORP25 citations92
US7817261B2Oct 19, 2010
Method of apparatus for detecting particles on a specimen
HITACHI HIGH TECH CORP4 citations73
US7787115B2Aug 31, 2010
Optical apparatus for defect inspection
HITACHI HIGH TECH CORP5 citations71
US7952700B2May 31, 2011
Method of apparatus for detecting particles on a specimen
HITACHI HIGH TECH CORP2 citations62
US8345233B2Jan 1, 2013
Inspection apparatus and inspection method
HITACHI HIGH TECH CORP0 citations50