Inventor

GOODRICH STEPHEN W

US3 patents

Patents

3 patents

US7305320B2Dec 4, 2007

Metrology tool recipe validator using best known methods

IBM8 citations69

US7535349B2May 19, 2009

Determining root cause for alarm in processing system

IBM3 citations59

US7716009B2May 11, 2010

Metrology tool recipe validator using best known methods

IBM3 citations58