Inventor
SOLECKY ERIC P
US26 patents
⚠️ This page may combine multiple inventors who share the name “SOLECKY ERIC P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
23 patentsUS6025600AFeb 15, 2000
Method for astigmatism correction in charged particle beam systems
IBM73 citations96
US6407396B1Jun 18, 2002
Wafer metrology structure
IBM45 citations92
US5969273AOct 19, 1999
Method and apparatus for critical dimension and tool resolution determination using edge width
IBM51 citations89
US7487054B2Feb 3, 2009
Automated dynamic metrology sampling system and method for process control
IBM9 citations78
US6789033B2Sep 7, 2004
Apparatus and method for characterizing features at small dimensions
IBM8 citations73
US6185323B1Feb 6, 2001
Method characterizing a feature using measurement imaging tool
IBM13 citations73
US7353128B2Apr 1, 2008
Measurement system optimization
IBM8 citations72
US7305320B2Dec 4, 2007
Metrology tool recipe validator using best known methods
IBM8 citations69
US7397252B2Jul 8, 2008
Measurement of critical dimension and quantification of electron beam size at real time using electron beam induced current
IBM4 citations63
US7532999B2May 12, 2009
Determining root cause of matching problem and/or fleet measurement precision problem for measurement system
IBM5 citations61
US7467063B2Dec 16, 2008
Determining fleet matching problem and root cause issue for measurement system
IBM4 citations61
US7340374B2Mar 4, 2008
Determining fleet matching problem and root cause issue for measurement system
IBM5 citations61
US7700946B2Apr 20, 2010
Structure for reducing prior level edge interference with critical dimension measurement
IBM2 citations60
US7645620B2Jan 12, 2010
Method and structure for reducing prior level edge interference with critical dimension measurement
IBM2 citations60
US7187993B2Mar 6, 2007
Metrology tool error log analysis methodology and system
IBM3 citations60
US7716009B2May 11, 2010
Metrology tool recipe validator using best known methods
IBM3 citations58
US7831395B2Nov 9, 2010
Quantification of adsorbed molecular contaminant using thin film measurement
IBM1 citations52
US7369947B2May 6, 2008
Quantification of adsorbed molecular contaminant using thin film measurement
IBM0 citations52
US7571070B2Aug 4, 2009
Measurement system fleet optimization
IBM1 citations51
US7358130B2Apr 15, 2008
Method for monitoring lateral encroachment of spacer process on a CD SEM
IBM0 citations51
US7105398B2Sep 12, 2006
Method for monitoring lateral encroachment of spacer process on a CD SEM
IBM0 citations51
US7881891B2Feb 1, 2011
Automated dynamic metrology sampling system and method for process control
IBM0 citations46
US7479396B2Jan 20, 2009
Structure, system and method for dimensionally unstable layer dimension measurement
IBM0 citations42