Inventor

VAKAS GEORGIOS A

US3 patents

⚠️ This page may combine multiple inventors who share the name “VAKAS GEORGIOS A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

2 patents

US7305320B2Dec 4, 2007

Metrology tool recipe validator using best known methods

IBM8 citations69

US7716009B2May 11, 2010

Metrology tool recipe validator using best known methods

IBM3 citations58

ARCHIE CHARLES N

1 patent

US8855401B2Oct 7, 2014

Methods and systems involving measuring complex dimensions of silicon devices

ARCHIE CHARLES N3 citations53