Inventor
ZIEMINS ULDIS A
US30 patents
⚠️ This page may combine multiple inventors who share the name “ZIEMINS ULDIS A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
28 patentsUS5541731AJul 30, 1996
Interferometric measurement and alignment technique for laser scanners
IBM101 citations96
US5609780AMar 11, 1997
Laser system
IBM60 citations94
US7287740B2Oct 30, 2007
Hoisting apparatus
IBM24 citations91
US6837777B2Jan 4, 2005
Wafer edge cleaning utilizing polish pad material
IBM39 citations91
US6622334B1Sep 23, 2003
Wafer edge cleaning utilizing polish pad material
IBM35 citations91
US6217422B1Apr 17, 2001
Light energy cleaning of polishing pads
IBM49 citations91
US5305138AApr 19, 1994
Superachromatic UV and visible focusing objective lens
IBM25 citations90
US6343974B1Feb 5, 2002
Real-time method for profiling and conditioning chemical-mechanical polishing pads
IBM43 citations88
US6178973B1Jan 30, 2001
Method and apparatus for ozone generation and surface treatment
IBM48 citations87
US5751588AMay 12, 1998
Multi-wavelength programmable laser processing mechanisms and apparatus utilizing vaporization detection
IBM17 citations84
US7854202B2Dec 21, 2010
Overhead transport service vehicle and method
IBM14 citations82
US7677180B2Mar 16, 2010
Apparatus and method for steering transport vehicles in semiconductor processing
IBM9 citations82
US7591624B2Sep 22, 2009
Reticle storage pod (RSP) transport system utilizing FOUP adapter plate
IBM8 citations82
US6836329B1Dec 28, 2004
Real time IR optical sensor
IBM18 citations82
US5618454AApr 8, 1997
Multi-wavelength programmable laser processing mechanisms and apparatus utilizing design data translation system
IBM16 citations82
US6620029B2Sep 16, 2003
Apparatus and method for front side chemical mechanical planarization (CMP) of semiconductor workpieces
IBM9 citations73
US5626778AMay 6, 1997
Multi-wavelength programmable laser processing mechanisms and apparatus utilizing spectrometer verification
IBM10 citations73
US7887277B2Feb 15, 2011
Reticle storage pod (RSP) transport system utilizing FOUP adapter plate
IBM6 citations72
US6227948B1May 8, 2001
Polishing pad reconditioning via polishing pad material as conditioner
IBM13 citations72
US5504612AApr 2, 1996
Synchronized XY laser scanner
IBM12 citations72
US5530595AJun 25, 1996
Variable focus color corrected field lens
IBM9 citations71
US5620618AApr 15, 1997
Multi-wavelength programmable laser processing mechanisms and apparatus
IBM4 citations62
US5543963AAug 6, 1996
Variable magnification laser imaging system
IBM3 citations60
US5448410ASep 5, 1995
Variable magnification laser imaging system
IBM3 citations60
US7356428B2Apr 8, 2008
Overhead traveling vehicle testing and calibration
IBM3 citations58
US6857434B2Feb 22, 2005
CMP slurry additive for foreign matter detection
IBM2 citations58
US7103458B2Sep 5, 2006
Automation system using wireless high frequency
IBM0 citations50
US7904269B2Mar 8, 2011
Overhead traveling vehicle testing and calibration
IBM0 citations48