Inventor
NA HAI-SUB
KR9 patents
⚠️ This page may combine multiple inventors who share the name “NA HAI-SUB”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
5 patentsUS8895226B2Nov 25, 2014
Coating composition for DUV filtering, method of forming photoresist pattern using the same and method of fabricating semiconductor device by using the method
SAMSUNG ELECTRONICS CO LTD6 citations83
US10062571B2Aug 28, 2018
Method of manufacturing semiconductor device
SAMSUNG ELECTRONICS CO LTD2 citations72
US9837272B2Dec 5, 2017
Methods of manufacturing semiconductor devices
SAMSUNG ELECTRONICS CO LTD3 citations71
US10468250B2Nov 5, 2019
Rinse solution and method of fabricating integrated circuit device by using the same
SAMSUNG ELECTRONICS CO LTD1 citations62
US9773672B2Sep 26, 2017
Method of forming micropatterns
SAMSUNG ELECTRONICS CO LTD1 citations51