Inventor
CHAMBERS BARRY LEWIS
US14 patents
⚠️ This page may combine multiple inventors who share the name “CHAMBERS BARRY LEWIS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ENTEGRIS INC
9 patentsUS9897257B2Feb 20, 2018
Anti-spike pressure management of pressure-regulated fluid storage and delivery vessels
ENTEGRIS INC16 citations81
US10109488B2Oct 23, 2018
Phosphorus or arsenic ion implantation utilizing enhanced source techniques
ENTEGRIS INC3 citations73
US9960042B2May 1, 2018
Carbon dopant gas and co-flow for implant beam and source life performance improvement
ENTEGRIS INC4 citations71
US12347639B2Jul 1, 2025
Method and systems useful for producing aluminum ions
ENTEGRIS INC0 citations62
US9142387B2Sep 22, 2015
Isotopically-enriched boron-containing compounds, and methods of making and using same
ENTEGRIS INC3 citations62
US11881376B2Jan 23, 2024
Method and systems useful for producing aluminum ions
ENTEGRIS INC0 citations59
US9685304B2Jun 20, 2017
Isotopically-enriched boron-containing compounds, and methods of making and using same
ENTEGRIS INC0 citations52
US10354877B2Jul 16, 2019
Carbon dopant gas and co-flow for implant beam and source life performance improvement
ENTEGRIS INC0 citations50
US10229840B2Mar 12, 2019
Ion implanter comprising integrated ventilation system
ENTEGRIS INC0 citations41
KAIM ROBERT
3 patentsUS8598022B2Dec 3, 2013
Isotopically-enriched boron-containing compounds, and methods of making and using same
KAIM ROBERT12 citations92
US8062965B2Nov 22, 2011
Isotopically-enriched boron-containing compounds, and methods of making and using same
KAIM ROBERT21 citations92
US8138071B2Mar 20, 2012
Isotopically-enriched boron-containing compounds, and methods of making and using same
KAIM ROBERT3 citations62