Inventor
SU EASON YU-SHEN
TW3 patents
⚠️ This page may combine multiple inventors who share the name “SU EASON YU-SHEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VENKATARAMAN SHYAM SUNDAR
2 patentsUS9524874B2Dec 20, 2016
Aqueous polishing composition and process for chemically mechanically polishing substrates containing silicon oxide dielectric and polysilicon films
VENKATARAMAN SHYAM SUNDAR6 citations65
US9157012B2Oct 13, 2015
Process for the manufacture of semiconductor devices comprising the chemical mechanical polishing of borophosphosilicate glass (BPSG) material in the presence of a CMP composition comprising anionic phosphate or phosphonate
VENKATARAMAN SHYAM SUNDAR0 citations42