Inventor
SATO YOSHITOMO
JP10 patents
⚠️ This page may combine multiple inventors who share the name “SATO YOSHITOMO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS11094569B2Aug 17, 2021
Substrate processing apparatus
TOKYO ELECTRON LTD3 citations71
US9027508B2May 12, 2015
Periphery coating apparatus, periphery coating method and storage medium therefor
TOKYO ELECTRON LTD5 citations71
US9082614B1Jul 14, 2015
Periphery coating apparatus, periphery coating method and storage medium therefor
TOKYO ELECTRON LTD0 citations50