Inventor
CHUNG SANGGYO
KR6 patents
Patents
6 patentsUS11842899B2Dec 12, 2023
Methods of cutting a fine pattern, methods of forming active patterns using the same, and methods of manufacturing a semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD2 citations66
US12293921B2May 6, 2025
Methods of cutting a fine pattern, methods of forming active patterns using the same, and methods of manufacturing a semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations56
US10522366B2Dec 31, 2019
Method of fabricating semiconductor device
SAMSUNG ELECTRONICS CO LTD1 citations55
US12532713B2Jan 20, 2026
Method for manufacturing semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations49
US10910231B2Feb 2, 2021
Method of fabricating semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations46
US12446220B2Oct 14, 2025
Semiconductor memory device and method of fabricating the same
SAMSUNG ELECTRONICS CO LTD0 citations45