Inventor

DEMIRER ONUR NIHAT

US2 patents

⚠️ This page may combine multiple inventors who share the name “DEMIRER ONUR NIHAT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

1 patent

US10444639B2Oct 15, 2019

Layer-to-layer feedforward overlay control with alignment corrections

KLA TENCOR CORP4 citations64

KLA CORP

1 patent

US11221561B2Jan 11, 2022

System and method for wafer-by-wafer overlay feedforward and lot-to-lot feedback control

KLA CORP0 citations43