Inventor
MATSUBARA YUYA
JP14 patents
⚠️ This page may combine multiple inventors who share the name “MATSUBARA YUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KIOXIA CORP
8 patentsUS12406842B2Sep 2, 2025
Substrate processing apparatus and method of producing semiconductor device
KIOXIA CORP0 citations62
US11859286B2Jan 2, 2024
Semiconductor manufacturing apparatus and manufacturing method of semiconductor device
KIOXIA CORP0 citations62
US11393675B2Jul 19, 2022
Substrate processing apparatus and method of producing semiconductor device
KIOXIA CORP0 citations62
US11935750B2Mar 19, 2024
Method for producing semiconductor device
KIOXIA CORP0 citations61
US11373865B2Jun 28, 2022
Method for manufacturing semiconductor device having a film with layers of different concentrations of elements
KIOXIA CORP0 citations61
US11367624B2Jun 21, 2022
Manufacturing method of semiconductor device
KIOXIA CORP0 citations61
US11823872B2Nov 21, 2023
Electrostatic chuck apparatus and semiconductor manufacturing apparatus
KIOXIA CORP0 citations60
US11766635B2Sep 26, 2023
Gas recovering apparatus, semiconductor manufacturing system, and gas recovering method
KIOXIA CORP0 citations50
TOSHIBA MEMORY CORP
4 patentsUS9754793B2Sep 5, 2017
Method for manufacturing semiconductor device
TOSHIBA MEMORY CORP8 citations83
US11177135B2Nov 16, 2021
Mask member and method for producing semiconductor device
TOSHIBA MEMORY CORP0 citations51
US10872782B2Dec 22, 2020
Method of manufacturing semiconductor device
TOSHIBA MEMORY CORP0 citations51
US10164180B2Dec 25, 2018
Variable resistance element and memory device
TOSHIBA MEMORY CORP0 citations51